Specifications

QRV-100 Quartz Research Vacuum Furnace Versatile Thermal

Diffusion/MOCVD Systems Scaled for R & D
PVI’s QRV-100 Quartz Research System is the ideal size for laboratory-scale thermal diffusion, including metal-organic chemical vapor deposition (MOCVD).

The QRV-100 is a quartz research vacuum furnace consisting of a split tube furnace and a quartz tube configured with stainless steel collars at each end of the tube. Gas inlet and pressure monitoring are provided on one end and gas exhaust at the other end of the tube. This configuration allows the substrates to be heated in a vacuum or with gas flowing. The furnace has three, split heater zones for control of the top and bottom heater elements.

The vacuum furnace is able to operate at temperatures up to 1050°C with maximum ramp rates of approx. 30°C per minute, depending on substrate load and other process parameters (pressure, gas flow, gas density). Two quartz radiation baffles are provided to maintain the heat within the process heating zone. The quartz vacuum tube is 4.5” OD X 4.3” ID X 50” long (other sizes are available). The process heating zone is 24” long with the ability to control the center 12” of the hot zone to within +/- 2°C.

The QRV-100 system includes a gas supply panel with stainless steel gas lines and VCR type fittings. Up to Eight mass flow controllers can be provided for process gases. A bypass line can be provided to direct process gases to a scrubber for purging if required. All gas lines have pressure gauges, inlet, and outlet pneumatic isolation valves that are under interlock control via the system controller. Any hazardous gases the customer selects will have the addition of nitrogen purge lines and isolation valves. The gas manifold will have a capacitance manometer to monitor pressure.

Quartz research vacuum furnace

The QRV-100 system, including the gas inlet panel, foreline panel, pump, and scrubber are mounted in an enclosure that minimizes the system footprint. The system has a dedicated vacuum pump, gauges, and related process control equipment. The system is designed and manufactured to have a high degree of reliability, safety, and flexibility.

Resistance heaters encompass the outer diameter of the quartz chamber. The heaters are mounted in an insulated split box heater frame with a vertical lift mechanism. The split furnace assembly can be automatically opened to allow accelerated cool down. The furnace has over-temperature protection to prevent damage to the heaters and system components.

The process control system manages all aspects of the QRV-100 system. Interlock protection is provided to protect the operator and system from over-temperature and other unsafe conditions. PVI provides an easy to use graphical user interface. Password protection provides restricted access to the control system. The control system provides a high degree of flexibility and process control over the system.

Facility Requirements

Power: 208-240VAC, 1 phase, 30 Amps
CDA for pneumatics and dry abatement
scrubber: 50sccm at 90 PSIG.
N2 for pneumatics (optional): 80-100 psi
N2 for Process: 20-35 psi

Applications

The QRV-100 is a research furnace used for materials research. Various materials can be deposited on a variety of small size substrates. Many processes can be performed with this furnace.

• Annealing
• Calcination
• Hydrogen reduction
• Sulfidation with hydrogen sulfide
• Nitridation with ammonia
• Carbonization with methane
• Selenization with hydrogen selenide

Precise vapor delivery

The QRV-100-MOCVD system includes up to three liquid vaporizers. The vapor delivery system includes carrier gas mass flow controllers with manifolds and liquid flow meters with manifolds for each vaporizer. Each vaporizer has a liquid source/purging ampoule and one spare. Each vaporizer has a control system that provides precise vapor delivery.